Caractérisation des couches minces de Y2O3 dopée Ce, élaborée par la méthode Sol-Gel «spin-coating»

Abstract

In this work, we have characterized thin films of cerium-doped yttrium oxide prepared by sol-gel spin coating technique. These thin layers deposited on silicon and glass substrates are characterized by different techniques such as: X-ray diffraction (XRD), UV-Visible spectroscopy, profilometry and the four-point method. X-ray diffraction study showed that grains have nanometric sizes. UV-Visible spectroscopy makes it possible to estimate the value of the gap which is decreased when the doping concentration increases. The electrical resistivity decreased at low concentrations and increases at high concentrations of cerium.